Title :
Stochastic heating in capacitively coupled plasmas
Author :
Bayrak, M. ; Brinkmann, R.P.
Author_Institution :
Dept..forTheoretical Electr. Eng., Ruhr Univ. Bochum, Bochum
Abstract :
This paper presents a new numerical method for solving the reduced kinetic equation. This technique is based on the finite volume control method, which is often used in computational fluid dynamics. Additionally, in the boundary conditions the stochastic heating mechanism of the sheath is taken into account. Furthermore, the quasineutrality condition instead of the Poisson equation to solve the potential is used.
Keywords :
finite volume methods; plasma heating; plasma kinetic theory; plasma sheaths; plasma simulation; stochastic processes; Poisson equation; capacitively coupled plasmas; computational fluid dynamics; finite volume control method; quasineutrality condition; reduced kinetic equation; sheath; stochastic heating; Distribution functions; Electrons; Heat engines; Kinetic theory; Plasma density; Plasma simulation; Plasma temperature; Poisson equations; Resistance heating; Stochastic processes;
Conference_Titel :
Plasma Science, 2008. ICOPS 2008. IEEE 35th International Conference on
Conference_Location :
Karlsruhe
Print_ISBN :
978-1-4244-1929-6
Electronic_ISBN :
0730-9244
DOI :
10.1109/PLASMA.2008.4590832
