Abstract :
The following topics are dealt with: magnetron sputtering system; zinc oxide nanocrystals; thin films; polymer coatings; semiconductor gas sensors; atomic layer deposition; atomic force microscope; high-k dielectrics; adsorption; and wettability.
Keywords :
II-VI semiconductors; adsorption; atomic force microscopy; coatings; high-k dielectric thin films; nanostructured materials; polymers; sputter deposition; wetting; zinc compounds; adsorption; atomic force microscope; atomic layer deposition; high-k dielectrics; magnetron sputtering system; polymer coatings; semiconductor gas sensors; thin films; wettability; zinc oxide nanocrystals;
Conference_Titel :
Students and Young Scientists Workshop "Photonics and Microsystems", 2009 International
Conference_Location :
Wernigerode
Print_ISBN :
978-1-4244-4304-8
DOI :
10.1109/STYSW.2009.5470290
