Title :
Polycrystalline CVD diamond-a new dielectric material for microwave electronics
Author :
Ralchenko, V.G. ; Konov, V.I. ; Parshin, V.V. ; Garin, B.M. ; Heidinger, R.
Author_Institution :
Natural Sci. Center of Gen. Phys. Inst., Russian Acad. of Sci., Moscow, Russia
Abstract :
Properties of polycrystalline diamond wafers produced by chemical vapor deposition (CVD) are described which show their importance for applications in microwave electronics. Today CVD diamonds become an engineering material whose unique thermal and electrophysical parameters make it very promising for a new generation of microwave devices.
Keywords :
diamond; dielectric materials; microwave devices; plasma CVD; CVD; chemical vapor deposition; electrophysical parameter; engineering material; microwave electronics; polycrystalline diamond wafer; Chemical vapor deposition; Crystallization; Dielectric materials; Hidden Markov models; Microwave technology; Organizing; Plasmas; Pulse width modulation; Rough surfaces; Surface roughness;
Conference_Titel :
Microwave and Telecommunication Technology, 2003. CriMiCo 2003. 13th International Crimean Conference
Conference_Location :
Sevastopol, Crimea, Ukraine
Print_ISBN :
966-7968-26-X
DOI :
10.1109/CRMICO.2003.158928
