DocumentCode
2438796
Title
Acoustic Investigations of Amorphous Films Using Rayleigh Waves
Author
von Haumeder, M. ; Strom, U. ; Hunklinger, S.
fYear
1979
fDate
1979
Firstpage
515
Lastpage
517
Keywords
Acoustic measurements; Acoustic waves; Amorphous materials; Attenuation; Dielectric materials; Semiconductor films; Semiconductor thin films; Sputtering; Surface acoustic waves; Temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
1979 Ultrasonics Symposium
Type
conf
DOI
10.1109/ULTSYM.1979.197255
Filename
1534195
Link To Document