Title :
Acoustic Investigations of Amorphous Films Using Rayleigh Waves
Author :
von Haumeder, M. ; Strom, U. ; Hunklinger, S.
Keywords :
Acoustic measurements; Acoustic waves; Amorphous materials; Attenuation; Dielectric materials; Semiconductor films; Semiconductor thin films; Sputtering; Surface acoustic waves; Temperature;
Conference_Titel :
1979 Ultrasonics Symposium
DOI :
10.1109/ULTSYM.1979.197255