DocumentCode :
2438796
Title :
Acoustic Investigations of Amorphous Films Using Rayleigh Waves
Author :
von Haumeder, M. ; Strom, U. ; Hunklinger, S.
fYear :
1979
fDate :
1979
Firstpage :
515
Lastpage :
517
Keywords :
Acoustic measurements; Acoustic waves; Amorphous materials; Attenuation; Dielectric materials; Semiconductor films; Semiconductor thin films; Sputtering; Surface acoustic waves; Temperature;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
1979 Ultrasonics Symposium
Type :
conf
DOI :
10.1109/ULTSYM.1979.197255
Filename :
1534195
Link To Document :
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