DocumentCode
2438869
Title
On investigation of impurities of tetrafluorosilane by microwave gas spectroscopy method
Author
Vaks, V.L. ; Domracheva, E.G. ; Chernyaeva, M.B.
Author_Institution
Inst. for Phys. of Microstructures RAS, Nizhny Novgorod, Russia
fYear
2003
fDate
8-12 Sept. 2003
Firstpage
568
Lastpage
569
Abstract
The possibilities of using of the microwave gas spectroscopy method for investigation of impurities of tetrafluorosilane are considered. The absorption lines of known impurities at 2-mm wavelength range are analyzed. The presence of freon was experimentally found.
Keywords
microwave spectra; microwave spectroscopy; 2 mm; absorption line; freon; microwave gas spectroscopy method; tetrafluorosilane impurity; Electromagnetic wave absorption; Frequency estimation; IEEE catalog; Impurities; Instruments; Magnetic flux leakage; Microwave theory and techniques; Organizing; Signal resolution; Spectroscopy;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave and Telecommunication Technology, 2003. CriMiCo 2003. 13th International Crimean Conference
Conference_Location
Sevastopol, Crimea, Ukraine
Print_ISBN
966-7968-26-X
Type
conf
DOI
10.1109/CRMICO.2003.158937
Filename
1256623
Link To Document