Title :
On investigation of impurities of tetrafluorosilane by microwave gas spectroscopy method
Author :
Vaks, V.L. ; Domracheva, E.G. ; Chernyaeva, M.B.
Author_Institution :
Inst. for Phys. of Microstructures RAS, Nizhny Novgorod, Russia
Abstract :
The possibilities of using of the microwave gas spectroscopy method for investigation of impurities of tetrafluorosilane are considered. The absorption lines of known impurities at 2-mm wavelength range are analyzed. The presence of freon was experimentally found.
Keywords :
microwave spectra; microwave spectroscopy; 2 mm; absorption line; freon; microwave gas spectroscopy method; tetrafluorosilane impurity; Electromagnetic wave absorption; Frequency estimation; IEEE catalog; Impurities; Instruments; Magnetic flux leakage; Microwave theory and techniques; Organizing; Signal resolution; Spectroscopy;
Conference_Titel :
Microwave and Telecommunication Technology, 2003. CriMiCo 2003. 13th International Crimean Conference
Conference_Location :
Sevastopol, Crimea, Ukraine
Print_ISBN :
966-7968-26-X
DOI :
10.1109/CRMICO.2003.158937
