The growth of zinc oxide nanocrystals on the zinc oxide thin film by chemical bath deposition

Author

Byrczek, Michal ; Malewicz, Miroslaw ; Teterycz, Helena

Author_Institution

Fac. of Microsyst. Electron. & Photonics, Wroclaw Univ. of Technol., Wroclaw, Poland

fYear

2009

fDate

25-27 June 2009

Firstpage

10

Lastpage

11

Abstract

In the paper the low temperature deposition of zinc oxide called Chemical Bath Deposition (CBD) will be described. Zinc oxide nanocrystals grow on the thin layer of ZnO. In our investigation the thin film of ZnO was deposited using spin coating, on the glass substrate covered with thin film of Indium Tin Oxide (ITO). The goal of our research is to develop a cheap method of ZnO nanostructures growth, which will be applied in electrochemical gas sensors as a gas sensitive layer.

Keywords

II-VI semiconductors; electrochemical sensors; gas sensors; indium compounds; nanostructured materials; semiconductor growth; semiconductor thin films; spin coating; tin compounds; wide band gap semiconductors; zinc compounds; InSnO-SiO₂; SiO₂; ZnO; chemical bath deposition; electrochemical gas sensors; gas sensitive layer; glass substrate; indium tin oxide; low-temperature deposition; nanostructure growth; spin coating; zinc oxide nanocrystals; zinc oxide thin film; Chemicals; Coatings; Glass; Indium tin oxide; Nanocrystals; Nanostructures; Sputtering; Substrates; Temperature; Zinc oxide;

fLanguage

English

Publisher

ieee

Conference_Titel

Students and Young Scientists Workshop "Photonics and Microsystems", 2009 International

Conference_Location

Wernigerode

Print_ISBN

978-1-4244-4304-8

Type

conf

DOI

10.1109/STYSW.2009.5470315

Filename

5470315