Title :
SAW Transduction on Silicon Substrates with PVF2 Films
Author :
Wagers, Robert S.
Keywords :
Acoustic propagation; Optical films; Optical surface waves; Permittivity; Polarization; Semiconductor films; Silicon; Stress; Substrates; Surface acoustic waves;
Conference_Titel :
1979 Ultrasonics Symposium
Conference_Location :
New Orleans, LA, USA
DOI :
10.1109/ULTSYM.1979.197283