DocumentCode :
2439275
Title :
SAW Transduction on Silicon Substrates with PVF2 Films
Author :
Wagers, Robert S.
fYear :
1979
fDate :
26-28 Sept. 1979
Firstpage :
645
Lastpage :
648
Keywords :
Acoustic propagation; Optical films; Optical surface waves; Permittivity; Polarization; Semiconductor films; Silicon; Stress; Substrates; Surface acoustic waves;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
1979 Ultrasonics Symposium
Conference_Location :
New Orleans, LA, USA
Type :
conf
DOI :
10.1109/ULTSYM.1979.197283
Filename :
1534223
Link To Document :
بازگشت