Title :
Characterization of RF Sputtered ZnO and ZnS Thin Films for SAW Transducers by X-Ray Diffraction Analysis
Author :
Schoenwald, J.S. ; Keester, K.L. ; Staples, E.J.
Keywords :
Glass; Piezoelectric films; Radio frequency; Sputtering; Substrates; Surface acoustic waves; Transducers; X-ray diffraction; Zinc compounds; Zinc oxide;
Conference_Titel :
1979 Ultrasonics Symposium
DOI :
10.1109/ULTSYM.1979.197339
