Title :
High Q, Temperature Stable ZnO-On-SILICON SAW RESONATORS
Author :
Martin, S.J. ; Gunshor, R.L. ; Pierret, R.F.
Keywords :
Aluminum; Chromium; Etching; Gold; Insertion loss; Optical films; Strips; Surface acoustic waves; Temperature; Zinc oxide;
Conference_Titel :
1980 Ultrasonics Symposium
DOI :
10.1109/ULTSYM.1980.197370
