DocumentCode

2440855

Title

High Q, Temperature Stable ZnO-On-SILICON SAW RESONATORS

Author

Martin, S.J. ; Gunshor, R.L. ; Pierret, R.F.

fYear

1980

fDate

1980

Firstpage

113

Lastpage

117

Keywords

Aluminum; Chromium; Etching; Gold; Insertion loss; Optical films; Strips; Surface acoustic waves; Temperature; Zinc oxide;

fLanguage

English

Publisher

ieee

Conference_Titel

1980 Ultrasonics Symposium

Type

conf

DOI

10.1109/ULTSYM.1980.197370

Filename

1534310