Title :
Microwave SAW Resonators Fabricated with Direct-Writing, Electron-Beam Lithography
Author :
Cross, Peter S. ; Rissman, Paul ; Shreve, William R.
Keywords :
Aluminum; Electrodes; Frequency; Gratings; Insertion loss; Lithography; Optical resonators; Propagation losses; Resists; Surface acoustic waves;
Conference_Titel :
1980 Ultrasonics Symposium
DOI :
10.1109/ULTSYM.1980.197379
