Active Aging of SAW Resonators

Author

Shreve, William R.

fYear

1980

fDate

1980

Firstpage

188

Lastpage

192

Keywords

Aging; Etching; Fabrication; Frequency; Oscillators; Packaging; Resists; Surface acoustic wave devices; Surface acoustic waves; Transducers;

fLanguage

English

Publisher

ieee

Conference_Titel

1980 Ultrasonics Symposium

Type

DOI

10.1109/ULTSYM.1980.197384

Filename

1534324

Link To Document