Title :
Non-uniform triggering of gg-nMOSt investigated by combined emission microscopy and transmission line pulsing
Author :
Russ, Christian ; Bock, Karlheinz ; Rasras, Mahmoud ; De Wolf, Ingrid ; Groeseneken, Guido ; Maes, Herman E.
Author_Institution :
IMEC, Leuven, Belgium
Abstract :
The triggering of grounded gate nMOSFET (gg-nMOS) and field-oxide devices (FOXFETs), essential for optimized ESD protection design, is addressed by TLP-pulsed emission microscopy. Current nonuniformity and instability effects in snapback operation under DC and TLP conditions are demonstrated. The comprehensive correlation of emission and electrical behaviour allows an improved interpretation of device operation. Technological influences on the trigger uniformity are discussed.
Keywords :
MOSFET; circuit optimisation; current fluctuations; electrostatic discharge; integrated circuit design; optical microscopy; protection; semiconductor device testing; transmission line theory; DC conditions; FOXFETs; TLP conditions; TLP-pulsed emission microscopy; current instability effects; current nonuniformity; device operation; electrical behaviour; emission behaviour; emission microscopy; field-oxide devices; gg-nMOSt; grounded gate nMOSFET; nonuniform triggering; optimized ESD protection design; snapback operation; transmission line pulsing; trigger uniformity; triggering; Avalanche breakdown; Design optimization; Electrostatic discharge; Fingers; Impact ionization; MOS devices; Microscopy; Protection; Testing; Transmission lines;
Conference_Titel :
Electrical Overstress/Electrostatic Discharge Symposium Proceedings, 1998
Conference_Location :
Reno, NV, USA
Print_ISBN :
1-878303-91-0
DOI :
10.1109/EOSESD.1998.737037
