DocumentCode
2441758
Title
Visualization of SAW Propagation with the Scanning Electron Microscope
Author
Veith, R. ; Eberharter, G. ; Feuerbaum, H.P. ; Knauer, U.
fYear
1980
fDate
1980
Firstpage
348
Lastpage
351
Keywords
Acoustic beams; Acoustic propagation; Acoustic transducers; Blanking; Electron beams; Monitoring; Scanning electron microscopy; Surface acoustic waves; Visualization; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
1980 Ultrasonics Symposium
Type
conf
DOI
10.1109/ULTSYM.1980.197417
Filename
1534357
Link To Document