مرکز منطقه ای اطلاع رساني علوم و فناوري - Low Loss 0.9-1.9 GHz SAW Filters with Submicron Finger Period Electrodes

DocumentCode :

2441833

Title :

Low Loss 0.9-1.9 GHz SAW Filters with Submicron Finger Period Electrodes

Author :

Urabe, S. ; Asakawa, K. ; Itoh, M. ; Gokan, H. ; Esho, S. ; Nishikawa, K. ; Nishihara, T.

fYear :

1980

fDate :

1980

Firstpage :

371

Lastpage :

376

Keywords :

Band pass filters; Electrodes; Electron beams; Fabrication; Fingers; Insertion loss; Ion beams; Resists; SAW filters; Sputter etching;

fLanguage :

English

Publisher :

ieee

Conference_Titel :

1980 Ultrasonics Symposium

Type :

conf

DOI :

10.1109/ULTSYM.1980.197422

Filename :

1534362

Link To Document :