DocumentCode :
2441833
Title :
Low Loss 0.9-1.9 GHz SAW Filters with Submicron Finger Period Electrodes
Author :
Urabe, S. ; Asakawa, K. ; Itoh, M. ; Gokan, H. ; Esho, S. ; Nishikawa, K. ; Nishihara, T.
fYear :
1980
fDate :
1980
Firstpage :
371
Lastpage :
376
Keywords :
Band pass filters; Electrodes; Electron beams; Fabrication; Fingers; Insertion loss; Ion beams; Resists; SAW filters; Sputter etching;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
1980 Ultrasonics Symposium
Type :
conf
DOI :
10.1109/ULTSYM.1980.197422
Filename :
1534362
Link To Document :
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