Title :
Attentuating Thin Films for SAW Devices
Author :
Anderson, A.C. ; Dolat, V.S. ; Brogan, W.T.
Keywords :
Attenuation; Conductivity; Optical films; Piezoelectric films; Substrates; Surface acoustic wave devices; Surface acoustic waves; Surface contamination; Surface waves; Thin film devices;
Conference_Titel :
1980 Ultrasonics Symposium
DOI :
10.1109/ULTSYM.1980.197436