• DocumentCode
    2442140
  • Title

    High-Frequency and Low-Dispersion SAW Devices on AlN/Al2O3and AlN/Si for Signal Processing

  • Author

    Tsubouchi, K. ; Sugai, K. ; Mikoshiba, N.

  • fYear
    1980
  • fDate
    1980
  • Firstpage
    446
  • Lastpage
    450
  • Keywords
    Chemical vapor deposition; Degradation; Grain size; Piezoelectric films; Semiconductor films; Signal processing; Silicon; Substrates; Surface acoustic wave devices; Wideband;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    1980 Ultrasonics Symposium
  • Type

    conf

  • DOI
    10.1109/ULTSYM.1980.197437
  • Filename
    1534377
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2442140