DocumentCode
2442161
Title
Low Temperature Growth of Piezoelectric AlN Film for Surface and Bulk Wave Transducers by RF Reactive Planar Magnetron Sputtering
Author
Shiosaki, T. ; Yamamoto, T. ; Oda, T. ; Harada, K. ; Kawabata, A.
fYear
1980
fDate
1980
Firstpage
451
Lastpage
454
Keywords
Glass; Gold; Piezoelectric films; Piezoelectric materials; Piezoelectric transducers; Radio frequency; Sputtering; Substrates; Surface waves; Temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
1980 Ultrasonics Symposium
Type
conf
DOI
10.1109/ULTSYM.1980.197438
Filename
1534378
Link To Document