DocumentCode
2442468
Title
Author index
fYear
2000
fDate
22-24 May 2000
Firstpage
172
Lastpage
172
Abstract
The author index contains an entry for each author and coauthor included in the proceedings record.
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Process-Induced Damage, 2000 5th International Symposium on
Conference_Location
Santa Clara, CA, USA
Print_ISBN
0-9651577-4-1
Type
conf
DOI
10.1109/PPID.2000.870672
Filename
870672
Link To Document