Title :
Materials and tribolofical properties of A-C:H film by plasma cvd for a disk overcoat
Author :
Toyoguchi, T. ; Yamamoto, Takayuki
Author_Institution :
Fujitsu Ltd.
Keywords :
Bonding; Lubricants; Lubrication; Magnetic films; Magnetic recording; Plasma materials processing; Plasma measurements; Plasma properties; Sputtering; Voltage;
Conference_Titel :
MMM-Intermag Conference, 1998. Abstracts., The 7th Joint
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-5118-5
DOI :
10.1109/INTMAG.1998.737102
