DocumentCode

2442618

Title

Materials and tribolofical properties of A-C:H film by plasma cvd for a disk overcoat

Author

Toyoguchi, T. ; Yamamoto, Takayuki

Author_Institution

Fujitsu Ltd.

fYear

1998

fDate

6-9 Jan. 1998

Firstpage

84

Lastpage

84

Keywords

Bonding; Lubricants; Lubrication; Magnetic films; Magnetic recording; Plasma materials processing; Plasma measurements; Plasma properties; Sputtering; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

MMM-Intermag Conference, 1998. Abstracts., The 7th Joint

Conference_Location

San Francisco, CA, USA

Print_ISBN

0-7803-5118-5

Type

conf

DOI

10.1109/INTMAG.1998.737102

Filename

737102