Title :
Deposition of high-durability protective layers with a composite structure of dlc and glc by facing-targets sputtering
Author :
Noda, Kentaro ; Kawanabe, Takashi ; Naoe, Masayuki
Author_Institution :
Yamato Lab.
Keywords :
Argon; Databases; Hard disks; Plasma confinement; Plasma properties; Plasma temperature; Protection; Raman scattering; Spectroscopy; Sputtering;
Conference_Titel :
MMM-Intermag Conference, 1998. Abstracts., The 7th Joint
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-5118-5
DOI :
10.1109/INTMAG.1998.737105
