Two Dimensional Photoacoustic Mapping of Ion-Implanted and Laser Annealed Semiconductors

Author

McFarlane, R.A. ; Hess, L.D. ; Olson, G.L.

fYear

1980

fDate

1980

Firstpage

628

Lastpage

632

Keywords

Absorption; Amorphous materials; Annealing; Gallium arsenide; Implants; Laser modes; Mirrors; Particle beam optics; Semiconductor lasers; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

1980 Ultrasonics Symposium

Type

DOI

10.1109/ULTSYM.1980.197474

Filename

1534414

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