DocumentCode
2443076
Title
Compensation of interface circuit errors for MEMS gyroscopes using state observers
Author
Chi, Chien-Yu ; Peng, Yen-Pin ; Chen, Tsung-Lin
Author_Institution
Dept. of Mech. Eng., Nat. Chiao Tung Univ., Hsinchu
fYear
2008
fDate
Nov. 30 2008-Dec. 3 2008
Firstpage
25
Lastpage
30
Abstract
This paper presents a novel approach that can compensate the error resulting from interface circuits for MEMS gyroscopes. Different from most of existing researches on gyroscopes wherein the interface circuits are either assumed to be ideal or optimized individually, this approach uses state estimation techniques to compensate the errors resulting from interface circuits and mechanical structure uncertainties, and to obtain correct angular rates for gyroscope systems. In a simulation case where the imperfections of interface circuits include: offset voltages of the operational amplifiers (3 mV and drifting with time), the parasitic capacitance (2 pF), and the measurement noise (white noise, 0.5 mV ), the proposed method can estimate the angular rate correctly with an estimation accuracy of 8 times 10-4rad/sec.
Keywords
gyroscopes; micromechanical devices; state estimation; vibration measurement; MEMS vibratory gyroscopes; interface circuit errors; mechanical structure uncertainties; operational amplifiers; parasitic capacitance; state estimation; state observers; white noise; Circuit simulation; Error correction; Gyroscopes; Micromechanical devices; Observers; Operational amplifiers; Parasitic capacitance; State estimation; Voltage; White noise;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensing Technology, 2008. ICST 2008. 3rd International Conference on
Conference_Location
Tainan
Print_ISBN
978-1-4244-2176-3
Electronic_ISBN
978-1-4244-2177-0
Type
conf
DOI
10.1109/ICSENST.2008.4757067
Filename
4757067
Link To Document