• DocumentCode
    2443076
  • Title

    Compensation of interface circuit errors for MEMS gyroscopes using state observers

  • Author

    Chi, Chien-Yu ; Peng, Yen-Pin ; Chen, Tsung-Lin

  • Author_Institution
    Dept. of Mech. Eng., Nat. Chiao Tung Univ., Hsinchu
  • fYear
    2008
  • fDate
    Nov. 30 2008-Dec. 3 2008
  • Firstpage
    25
  • Lastpage
    30
  • Abstract
    This paper presents a novel approach that can compensate the error resulting from interface circuits for MEMS gyroscopes. Different from most of existing researches on gyroscopes wherein the interface circuits are either assumed to be ideal or optimized individually, this approach uses state estimation techniques to compensate the errors resulting from interface circuits and mechanical structure uncertainties, and to obtain correct angular rates for gyroscope systems. In a simulation case where the imperfections of interface circuits include: offset voltages of the operational amplifiers (3 mV and drifting with time), the parasitic capacitance (2 pF), and the measurement noise (white noise, 0.5 mV ), the proposed method can estimate the angular rate correctly with an estimation accuracy of 8 times 10-4rad/sec.
  • Keywords
    gyroscopes; micromechanical devices; state estimation; vibration measurement; MEMS vibratory gyroscopes; interface circuit errors; mechanical structure uncertainties; operational amplifiers; parasitic capacitance; state estimation; state observers; white noise; Circuit simulation; Error correction; Gyroscopes; Micromechanical devices; Observers; Operational amplifiers; Parasitic capacitance; State estimation; Voltage; White noise;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Sensing Technology, 2008. ICST 2008. 3rd International Conference on
  • Conference_Location
    Tainan
  • Print_ISBN
    978-1-4244-2176-3
  • Electronic_ISBN
    978-1-4244-2177-0
  • Type

    conf

  • DOI
    10.1109/ICSENST.2008.4757067
  • Filename
    4757067