• DocumentCode
    2443122
  • Title

    Nonvolatile nanocrystal floating gate memory with NON tunnel barrier

  • Author

    Baik, Seung Jae ; Choi, Siyoung ; Chung, U-In ; Moon, Joo Tae

  • Author_Institution
    Memory Div., Samsung Electron. Co. Ltd, Yongin-City, South Korea
  • fYear
    2003
  • fDate
    16-18 Sept. 2003
  • Firstpage
    509
  • Lastpage
    511
  • Abstract
    The nanocrystal floating gate flash memory has a potential advantage in high-density floating gate memory for its superior scalability over its conventional structure. However, the retention and small sensing window have remained as the main issues for practical applications. In this work, we propose a nitride/oxide/nitride (NON) tunnel barrier, which is more sensitive to the gate bias than the uniform oxide barrier, and present real nonvolatile memory with a 1 V window after 10 years at 85/spl deg/C with programming at 8 V, 10 /spl mu/s and erasing at -8 V, loops.
  • Keywords
    flash memories; nanoelectronics; random-access storage; silicon compounds; -8 V; 10 mus; 10 year; 8 V; 85 degC; NON tunnel barrier; SiO/sub 2/-Si/sub 3/N/sub 4/; high-density memory scalability; nanocrystal floating gate flash memory; nitride/oxide/nitride tunnel barrier; nonvolatile memory; retention time; sensing window size; CMOS technology; Capacitance-voltage characteristics; Electronic mail; Flash memory cells; Frequency; Moon; Nanocrystals; Nonvolatile memory; Testing; Threshold voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    European Solid-State Device Research, 2003. ESSDERC '03. 33rd Conference on
  • Conference_Location
    Estoril, Portugal
  • Print_ISBN
    0-7803-7999-3
  • Type

    conf

  • DOI
    10.1109/ESSDERC.2003.1256925
  • Filename
    1256925