DocumentCode
2443305
Title
ZnO Processing for Bulk- and Surface-Wave Devices
Author
Hickernell, Fred S.
fYear
1980
fDate
1980
Firstpage
785
Lastpage
794
Keywords
Acoustic devices; Acoustic transducers; Acoustic waves; Optical films; Optical surface waves; Piezoelectric films; Sputtering; Surface acoustic wave devices; Surface acoustic waves; Zinc oxide;
fLanguage
English
Publisher
ieee
Conference_Titel
1980 Ultrasonics Symposium
Type
conf
DOI
10.1109/ULTSYM.1980.197506
Filename
1534446
Link To Document