DocumentCode :
2443305
Title :
ZnO Processing for Bulk- and Surface-Wave Devices
Author :
Hickernell, Fred S.
fYear :
1980
fDate :
1980
Firstpage :
785
Lastpage :
794
Keywords :
Acoustic devices; Acoustic transducers; Acoustic waves; Optical films; Optical surface waves; Piezoelectric films; Sputtering; Surface acoustic wave devices; Surface acoustic waves; Zinc oxide;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
1980 Ultrasonics Symposium
Type :
conf
DOI :
10.1109/ULTSYM.1980.197506
Filename :
1534446
Link To Document :
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