Title : 
ZnO Processing for Bulk- and Surface-Wave Devices
         
        
            Author : 
Hickernell, Fred S.
         
        
        
        
        
        
            Keywords : 
Acoustic devices; Acoustic transducers; Acoustic waves; Optical films; Optical surface waves; Piezoelectric films; Sputtering; Surface acoustic wave devices; Surface acoustic waves; Zinc oxide;
         
        
        
        
            Conference_Titel : 
1980 Ultrasonics Symposium
         
        
        
            DOI : 
10.1109/ULTSYM.1980.197506