Title :
ZnO Processing for Bulk- and Surface-Wave Devices
Author :
Hickernell, Fred S.
Keywords :
Acoustic devices; Acoustic transducers; Acoustic waves; Optical films; Optical surface waves; Piezoelectric films; Sputtering; Surface acoustic wave devices; Surface acoustic waves; Zinc oxide;
Conference_Titel :
1980 Ultrasonics Symposium
DOI :
10.1109/ULTSYM.1980.197506