DocumentCode :
2443324
Title :
Sputter Deposition of ZnO Thin Films Using Glow Discharge Mass Spectrometry
Author :
Aita, Carolyn R.
fYear :
1980
fDate :
1980
Firstpage :
795
Lastpage :
800
Keywords :
Crystallization; Crystallography; Glow discharges; Mass spectroscopy; Piezoelectric films; Plasma properties; Plasma temperature; Sputtering; Substrates; Zinc oxide;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
1980 Ultrasonics Symposium
Type :
conf
DOI :
10.1109/ULTSYM.1980.197507
Filename :
1534447
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2443324
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