مرکز منطقه ای اطلاع رساني علوم و فناوري - Fundamental Mode VHF/UHF Bulk Acoustic Wave Resonators and Filters on Silicon

DocumentCode :

2443475

Title :

Fundamental Mode VHF/UHF Bulk Acoustic Wave Resonators and Filters on Silicon

Author :

Grudkowski, T.W. ; Black, J.F. ; Reeder, T.M. ; Cullen, D.E. ; Wagner, R.A.

fYear :

1980

fDate :

1980

Firstpage :

829

Lastpage :

833

Keywords :

Acoustic waves; Band pass filters; Boron; Etching; Frequency; Resonance; Resonator filters; Silicon; Substrates; Zinc oxide;

fLanguage :

English

Publisher :

ieee

Conference_Titel :

1980 Ultrasonics Symposium

Type :

conf

DOI :

10.1109/ULTSYM.1980.197514

Filename :

1534454

Link To Document :