Fundamental Mode VHF/UHF Bulk Acoustic Wave Resonators and Filters on Silicon

Author

Grudkowski, T.W. ; Black, J.F. ; Reeder, T.M. ; Cullen, D.E. ; Wagner, R.A.

fYear

1980

fDate

1980

Firstpage

829

Lastpage

833

Keywords

Acoustic waves; Band pass filters; Boron; Etching; Frequency; Resonance; Resonator filters; Silicon; Substrates; Zinc oxide;

fLanguage

English

Publisher

ieee

Conference_Titel

1980 Ultrasonics Symposium

Type

DOI

10.1109/ULTSYM.1980.197514

Filename

1534454

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