DocumentCode
2443482
Title
UHF Composite Bulk Wave Resonators
Author
Lakin, K.M. ; Wang, J.S.
fYear
1980
fDate
1980
Firstpage
834
Lastpage
837
Keywords
Acoustic waves; Biomembranes; Fabrication; Microelectronics; Piezoelectric films; Resonance; Resonant frequency; Substrates; Surface acoustic wave devices; Zinc oxide;
fLanguage
English
Publisher
ieee
Conference_Titel
1980 Ultrasonics Symposium
Type
conf
DOI
10.1109/ULTSYM.1980.197515
Filename
1534455
Link To Document