Title :
UHF Composite Bulk Wave Resonators
Author :
Lakin, K.M. ; Wang, J.S.
Keywords :
Acoustic waves; Biomembranes; Fabrication; Microelectronics; Piezoelectric films; Resonance; Resonant frequency; Substrates; Surface acoustic wave devices; Zinc oxide;
Conference_Titel :
1980 Ultrasonics Symposium
DOI :
10.1109/ULTSYM.1980.197515