Title : 
Thin Film ZnO-MOS Transducer with Virtually DC Response
         
        
            Author : 
Chen, P.L. ; Mueller, R.S. ; White, R.M. ; Jolly, R.
         
        
        
        
        
        
            Keywords : 
Acoustic transducers; Capacitive sensors; FETs; MOSFETs; Piezoelectric films; Piezoelectric transducers; Silicon compounds; Transistors; Ultrasonic transducers; Zinc oxide;
         
        
        
        
            Conference_Titel : 
1980 Ultrasonics Symposium
         
        
        
            DOI : 
10.1109/ULTSYM.1980.197536