Characteristics of the microplasma generated in a flexible plasma device

In this paper microplasma generated in a flexible plasma device was investigated. Various plastic films were used as front and rear substrates to fabricate the flexible plasma device. On the rear substrate, a copper metal was patterned as sustain electrodes via the thermal evaporation and a photolithography method. Following this, a dielectric and a MgO protective layers were coated via spin coating and e-beam evaporation method, respectively. Barrier ribs were formed to make the discharge space between front and rear substrates. Finally, the two substrates were sealed. The Ne gas was used as a discharge gas. From the measurement results, microplasma showed the different electrical and optical characteristics in accordance with a variation of the thickness of the dielectric layer and a gas pressure. Additionally, the microplasma characteristics were investigated by varying the aging time of the MgO layer.