DocumentCode
2444301
Title
Acoustic Properties of Amorphous SiHx -Films
Author
Haumeder, M.V. ; Bhatia, K.L. ; Hunklinger, S.
fYear
1980
fDate
1980
Firstpage
1036
Lastpage
1039
Keywords
Absorption; Amorphous materials; Annealing; Attenuation; Mechanical factors; Semiconductor thin films; Sputtering; Substrates; Surface acoustic wave devices; Thin film devices;
fLanguage
English
Publisher
ieee
Conference_Titel
1980 Ultrasonics Symposium
Type
conf
DOI
10.1109/ULTSYM.1980.197556
Filename
1534496
Link To Document