Title :
MEMS inductor in LC receivers for the RF link of cochlear implants
Author :
Mezghani, B. ; Smaoui, S. ; Masmoudi, M. ; Dufaza, C.
Author_Institution :
Lab. d´´Electronique et des Technol. de l´´Inf., ENIS, Sfax, Tunisia
Abstract :
In this paper, we present the study and simulation of different micromachined inductor models. We show, from simulation results, that the loss in the output voltage level is mainly due to the series metal resistance of the inductor. The inductor metal width was increased from 1.9 μm to 10 μm, which decreased the series resistance. The output voltage level increased from 1V to 3V. To further increase the cross sectional area of the inductor metal, a new concept of micromachined inductor on silicon is presented. The new inductor is formed by connecting metal 1 to metal 2, thus a reduction in the series resistance of 70% could be obtained.
Keywords :
UHF detectors; handicapped aids; inductors; micromechanical devices; micromechanical resonators; 1 to 3 V; 1.9 to 10 micron; LC receivers; LC resonators; MEMS inductor; RF link; cochlear implants; cross sectional area; inductor metal width; micromachined inductor models; output voltage level; series metal resistance; Active inductors; Circuits; Cochlear implants; Deafness; Ear; Micromechanical devices; Prosthetics; Radio frequency; Silicon; Voltage;
Conference_Titel :
Microelectronics, 2001. ICM 2001 Proceedings. The 13th International Conference on
Print_ISBN :
0-7803-7522-X
DOI :
10.1109/ICM.2001.997517
