DocumentCode
2445565
Title
Synthesis of aligned zinc oxide nanorods for humidity sensing
Author
Wang, Yun ; Yeow, John T W ; Chen, Liang-Yih
Author_Institution
Dept. of Syst. Design Eng., Univ. of Waterloo, Waterloo, ON
fYear
2008
fDate
Nov. 30 2008-Dec. 3 2008
Firstpage
670
Lastpage
673
Abstract
Aligned zinc oxide nanorods thin film was synthesized by the hydrothermal method. The nanorods were vertically aligned on an indium tin oxide substrate. The length of the nanorods can be controlled by repetitive reactions. Preliminary results of the humidity sensing properties of the nanorods are reported. A 450 nm thick nanorods thin film was measured in this paper. The resistance response under changing Relative Humidity (RH) is characterized. In contrast to most of related reports of humidity sensing by ZnO, a resistance increase of the nanorods during was observed when they are exposed to water molecules.
Keywords
II-VI semiconductors; crystal growth from solution; humidity sensors; indium compounds; nanofabrication; zinc compounds; ITO; ZnO; humidity sensing; hydrothermal method; nanorod synthesis; relative humidity; size 450 nm; Crystallization; Furnaces; Humidity; Indium tin oxide; Nanoparticles; Nanostructured materials; Rapid thermal annealing; Substrates; Transistors; Zinc oxide; Zinc oxide nanomaterials; adsorption; humidity sensing; nanorods;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensing Technology, 2008. ICST 2008. 3rd International Conference on
Conference_Location
Tainan
Print_ISBN
978-1-4244-2176-3
Electronic_ISBN
978-1-4244-2177-0
Type
conf
DOI
10.1109/ICSENST.2008.4757190
Filename
4757190
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