DocumentCode :
2445565
Title :
Synthesis of aligned zinc oxide nanorods for humidity sensing
Author :
Wang, Yun ; Yeow, John T W ; Chen, Liang-Yih
Author_Institution :
Dept. of Syst. Design Eng., Univ. of Waterloo, Waterloo, ON
fYear :
2008
fDate :
Nov. 30 2008-Dec. 3 2008
Firstpage :
670
Lastpage :
673
Abstract :
Aligned zinc oxide nanorods thin film was synthesized by the hydrothermal method. The nanorods were vertically aligned on an indium tin oxide substrate. The length of the nanorods can be controlled by repetitive reactions. Preliminary results of the humidity sensing properties of the nanorods are reported. A 450 nm thick nanorods thin film was measured in this paper. The resistance response under changing Relative Humidity (RH) is characterized. In contrast to most of related reports of humidity sensing by ZnO, a resistance increase of the nanorods during was observed when they are exposed to water molecules.
Keywords :
II-VI semiconductors; crystal growth from solution; humidity sensors; indium compounds; nanofabrication; zinc compounds; ITO; ZnO; humidity sensing; hydrothermal method; nanorod synthesis; relative humidity; size 450 nm; Crystallization; Furnaces; Humidity; Indium tin oxide; Nanoparticles; Nanostructured materials; Rapid thermal annealing; Substrates; Transistors; Zinc oxide; Zinc oxide nanomaterials; adsorption; humidity sensing; nanorods;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Sensing Technology, 2008. ICST 2008. 3rd International Conference on
Conference_Location :
Tainan
Print_ISBN :
978-1-4244-2176-3
Electronic_ISBN :
978-1-4244-2177-0
Type :
conf
DOI :
10.1109/ICSENST.2008.4757190
Filename :
4757190
Link To Document :
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