• DocumentCode
    2445565
  • Title

    Synthesis of aligned zinc oxide nanorods for humidity sensing

  • Author

    Wang, Yun ; Yeow, John T W ; Chen, Liang-Yih

  • Author_Institution
    Dept. of Syst. Design Eng., Univ. of Waterloo, Waterloo, ON
  • fYear
    2008
  • fDate
    Nov. 30 2008-Dec. 3 2008
  • Firstpage
    670
  • Lastpage
    673
  • Abstract
    Aligned zinc oxide nanorods thin film was synthesized by the hydrothermal method. The nanorods were vertically aligned on an indium tin oxide substrate. The length of the nanorods can be controlled by repetitive reactions. Preliminary results of the humidity sensing properties of the nanorods are reported. A 450 nm thick nanorods thin film was measured in this paper. The resistance response under changing Relative Humidity (RH) is characterized. In contrast to most of related reports of humidity sensing by ZnO, a resistance increase of the nanorods during was observed when they are exposed to water molecules.
  • Keywords
    II-VI semiconductors; crystal growth from solution; humidity sensors; indium compounds; nanofabrication; zinc compounds; ITO; ZnO; humidity sensing; hydrothermal method; nanorod synthesis; relative humidity; size 450 nm; Crystallization; Furnaces; Humidity; Indium tin oxide; Nanoparticles; Nanostructured materials; Rapid thermal annealing; Substrates; Transistors; Zinc oxide; Zinc oxide nanomaterials; adsorption; humidity sensing; nanorods;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Sensing Technology, 2008. ICST 2008. 3rd International Conference on
  • Conference_Location
    Tainan
  • Print_ISBN
    978-1-4244-2176-3
  • Electronic_ISBN
    978-1-4244-2177-0
  • Type

    conf

  • DOI
    10.1109/ICSENST.2008.4757190
  • Filename
    4757190