DocumentCode :
2446134
Title :
Acoustic, Optical Properties of AlN Films Grown at Low Temperature by Modified Sputter Gun
Author :
Onishi, S. ; Eschwei, M. ; Bielaczy, S. ; Wang, W.-C.
fYear :
1981
fDate :
14-16 Oct. 1981
Firstpage :
372
Lastpage :
374
Keywords :
Electron traps; Glass; Magnetic fields; Magnetic films; Optical films; Optical surface waves; Plasma temperature; Semiconductor films; Sputtering; Substrates;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
1981 Ultrasonics Symposium
Conference_Location :
Chicago, IL, USA
Type :
conf
DOI :
10.1109/ULTSYM.1981.197645
Filename :
1534585
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2446134
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