DocumentCode
2446134
Title
Acoustic, Optical Properties of AlN Films Grown at Low Temperature by Modified Sputter Gun
Author
Onishi, S. ; Eschwei, M. ; Bielaczy, S. ; Wang, W.-C.
fYear
1981
fDate
14-16 Oct. 1981
Firstpage
372
Lastpage
374
Keywords
Electron traps; Glass; Magnetic fields; Magnetic films; Optical films; Optical surface waves; Plasma temperature; Semiconductor films; Sputtering; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
1981 Ultrasonics Symposium
Conference_Location
Chicago, IL, USA
Type
conf
DOI
10.1109/ULTSYM.1981.197645
Filename
1534585
Link To Document