DocumentCode :
2446175
Title :
AlN Material Constants Evaluation and SAW Properties on AlN/Al2O3and AlN/Si
Author :
Tsubouchi, K. ; Sugai, K. ; Mikoshiba, N.
fYear :
1981
fDate :
14-16 Oct. 1981
Firstpage :
375
Lastpage :
380
Keywords :
Chemical vapor deposition; Dielectrics and electrical insulation; Epitaxial growth; Permittivity; Piezoelectric films; Piezoelectric materials; Silicon; Sputtering; Surface acoustic wave devices; Surface acoustic waves;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
1981 Ultrasonics Symposium
Conference_Location :
Chicago, IL, USA
Type :
conf
DOI :
10.1109/ULTSYM.1981.197646
Filename :
1534586
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2446175
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