DocumentCode :
2446187
Title :
Sputtered Aluminum Nitride on Silicon for SAW Device Applications
Author :
Pearce, L.G. ; Gunshor, R.L. ; Pierret, R.F.
fYear :
1981
fDate :
14-16 Oct. 1981
Firstpage :
381
Lastpage :
383
Keywords :
Aluminum nitride; Delay lines; Piezoelectric films; Semiconductor films; Silicon; Sputtering; Substrates; Surface acoustic wave devices; Surface acoustic waves; Temperature;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
1981 Ultrasonics Symposium
Conference_Location :
Chicago, IL, USA
Type :
conf
DOI :
10.1109/ULTSYM.1981.197647
Filename :
1534587
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2446187
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