DocumentCode
2446187
Title
Sputtered Aluminum Nitride on Silicon for SAW Device Applications
Author
Pearce, L.G. ; Gunshor, R.L. ; Pierret, R.F.
fYear
1981
fDate
14-16 Oct. 1981
Firstpage
381
Lastpage
383
Keywords
Aluminum nitride; Delay lines; Piezoelectric films; Semiconductor films; Silicon; Sputtering; Substrates; Surface acoustic wave devices; Surface acoustic waves; Temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
1981 Ultrasonics Symposium
Conference_Location
Chicago, IL, USA
Type
conf
DOI
10.1109/ULTSYM.1981.197647
Filename
1534587
Link To Document