DocumentCode
2446303
Title
Resonators With Reduced Frequency Sensitivity to Static and Dynamic Stresses
Author
Nakazawa, M. ; Lukaszek, T. ; Ballato, A.
fYear
1981
fDate
14-16 Oct. 1981
Firstpage
410
Lastpage
413
Keywords
Acceleration; Biomembranes; Electrodes; Equivalent circuits; Laboratories; Microelectronics; Resonant frequency; Stability; Stress; Surface acoustic waves;
fLanguage
English
Publisher
ieee
Conference_Titel
1981 Ultrasonics Symposium
Conference_Location
Chicago, IL, USA
Type
conf
DOI
10.1109/ULTSYM.1981.197653
Filename
1534593
Link To Document