Title :
Resonators With Reduced Frequency Sensitivity to Static and Dynamic Stresses
Author :
Nakazawa, M. ; Lukaszek, T. ; Ballato, A.
Keywords :
Acceleration; Biomembranes; Electrodes; Equivalent circuits; Laboratories; Microelectronics; Resonant frequency; Stability; Stress; Surface acoustic waves;
Conference_Titel :
1981 Ultrasonics Symposium
Conference_Location :
Chicago, IL, USA
DOI :
10.1109/ULTSYM.1981.197653