Title :
Area-Scaling of Tunnel Junctions: Comparison Between Shadow Evaporation and Lithographic Processing
Author :
Boeve, H. ; Dutta, Bahnishikha ; DeBoeck, J. ; Borghs, G. ; Moodera, J.S. ; van de Veerdonck, R.J.M.
Author_Institution :
IMEC
Keywords :
Glass; Magnetic heads; Magnetic hysteresis; Magnetic separation; Magnetic tunneling; Milling; Plasma temperature; Substrates; Temperature measurement; Vacuum systems;
Conference_Titel :
MMM-Intermag Conference, 1998. Abstracts., The 7th Joint
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-5118-5
DOI :
10.1109/INTMAG.1998.737318