Title :
High Deposition Rate Sputtered ZnO Fin Films for BAW and SAW Applications
Keywords :
Glass; Optical films; Piezoelectric films; Semiconductor films; Silicon; Sputtering; Substrates; Surface acoustic waves; Temperature; Zinc oxide;
Conference_Titel :
1981 Ultrasonics Symposium
Conference_Location :
Chicago, IL, USA
DOI :
10.1109/ULTSYM.1981.197668
