DocumentCode
2446639
Title
Post-Deposition Annealing of Zinc Oxide Films
Author
Hickernell, Fred S.
fYear
1981
fDate
14-16 Oct. 1981
Firstpage
489
Lastpage
492
Keywords
Annealing; Furnaces; Isothermal processes; Optical attenuators; Optical films; Optical surface waves; Optical waveguides; Temperature; Waveguide lasers; Zinc oxide;
fLanguage
English
Publisher
ieee
Conference_Titel
1981 Ultrasonics Symposium
Conference_Location
Chicago, IL, USA
Type
conf
DOI
10.1109/ULTSYM.1981.197669
Filename
1534609
Link To Document