DocumentCode :
2446639
Title :
Post-Deposition Annealing of Zinc Oxide Films
Author :
Hickernell, Fred S.
fYear :
1981
fDate :
14-16 Oct. 1981
Firstpage :
489
Lastpage :
492
Keywords :
Annealing; Furnaces; Isothermal processes; Optical attenuators; Optical films; Optical surface waves; Optical waveguides; Temperature; Waveguide lasers; Zinc oxide;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
1981 Ultrasonics Symposium
Conference_Location :
Chicago, IL, USA
Type :
conf
DOI :
10.1109/ULTSYM.1981.197669
Filename :
1534609
Link To Document :
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