Title :
Post-Deposition Annealing of Zinc Oxide Films
Author :
Hickernell, Fred S.
Keywords :
Annealing; Furnaces; Isothermal processes; Optical attenuators; Optical films; Optical surface waves; Optical waveguides; Temperature; Waveguide lasers; Zinc oxide;
Conference_Titel :
1981 Ultrasonics Symposium
Conference_Location :
Chicago, IL, USA
DOI :
10.1109/ULTSYM.1981.197669