DocumentCode :
2446689
Title :
Plasma-Enhanced Metalorganic Chemical Vapor Deposition of C-Axis Oriented and Epitaxial Films of ZnO at Low Substrate Temperatures
Author :
Shiosaki, T. ; Shimizu, M. ; Yamamto, T. ; Yagi, M. ; Kawabata, A.
fYear :
1981
fDate :
14-16 Oct. 1981
Firstpage :
498
Lastpage :
501
Keywords :
Chemical transducers; Chemical vapor deposition; Optical devices; Optical films; Optical refraction; Plasma chemistry; Plasma temperature; Substrates; Temperature distribution; Zinc oxide;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
1981 Ultrasonics Symposium
Conference_Location :
Chicago, IL, USA
Type :
conf
DOI :
10.1109/ULTSYM.1981.197671
Filename :
1534611
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2446689
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