DocumentCode
2446699
Title
Sputtered AlN Films for Bulk-Acoustic-Wave Devices
Author
Wang, J.S. ; Lakin, K.M.
fYear
1981
fDate
14-16 Oct. 1981
Firstpage
502
Lastpage
505
Keywords
Acoustic measurements; Film bulk acoustic resonators; Frequency; Nitrogen; Piezoelectric films; Plasma devices; Plasma temperature; Semiconductor films; Sputtering; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
1981 Ultrasonics Symposium
Conference_Location
Chicago, IL, USA
Type
conf
DOI
10.1109/ULTSYM.1981.197672
Filename
1534612
Link To Document