DocumentCode
2446714
Title
Low-Temperature Growth of the Piezoelectric AlN Film and Its Optical and Acoustical Properties
Author
Shiosaki, T. ; Harada, K. ; Kawabata, A.
fYear
1981
fDate
14-16 Oct. 1981
Firstpage
506
Lastpage
509
Keywords
Argon; Glass; Optical films; Optical surface waves; Piezoelectric films; Semiconductor films; Sputtering; Substrates; Surface acoustic waves; Temperature dependence;
fLanguage
English
Publisher
ieee
Conference_Titel
1981 Ultrasonics Symposium
Conference_Location
Chicago, IL, USA
Type
conf
DOI
10.1109/ULTSYM.1981.197673
Filename
1534613
Link To Document