Acoustic Microscopy: Recent Applications in Semiconducting Devices

Author

Attal, J. ; Cambon, G. ; Rouzeyre, M.

fYear

1981

fDate

14-16 Oct. 1981

Firstpage

557

Lastpage

560

Keywords

Absorption; Acoustic applications; Acoustic devices; Frequency; Lenses; Liquids; Microscopy; Semiconductivity; Silicon; Solid state circuits;

fLanguage

English

Publisher

ieee

Conference_Titel

1981 Ultrasonics Symposium

Conference_Location

Chicago, IL, USA

Type

DOI

10.1109/ULTSYM.1981.197683

Filename

1534623

Link To Document