Title :
Demonstration of a micro-CPL based on MEMS fabrication technologies
Author :
Kirshberg, Jeffrey ; Yerkes, Kirk L. ; Liepmann, Dorian
Author_Institution :
Dept. of Mech. Eng., California Univ., Berkeley, CA, USA
Abstract :
Utilizing current micro electro mechanical systems (MEMS) technologies, a three-port microcapillary pumped loop (micro-CPL) was designed, fabricated and tested to provide integral cooling to electronics or MEMS type devices. The two wafer design consists of one silicon and one borofloat glass wafer. An analytical study was used in determining the geometry of the device, including the evaporator dimensions (1000 μm×2000 μm) and the length of the liquid and vapor lines (35 mm). Using laser spot heating, the finished device was run near steady-state. It was determined that a laser delivering 8.5 W (+/-0.2 W) with a spotsize diameter of 3.5 mm caused dry-out of the micro-CPL
Keywords :
cooling; heat sinks; micromechanical devices; 1000 mum; 2000 mum; 3.5 mm; 35 mm; 8.5 W; MEMS fabrication technologies; borofloat glass wafer; electronics; evaporator dimensions; integral cooling; laser spot heating; liquid line length; micro electro mechanical systems; micro-CPL; silicon wafer; three-port microcapillary pumped loop; two wafer design; vapor line length; Electronic equipment testing; Electronics cooling; Fabrication; Geometrical optics; Glass; Heating; Mechanical systems; Micromechanical devices; Silicon; System testing;
Conference_Titel :
Energy Conversion Engineering Conference and Exhibit, 2000. (IECEC) 35th Intersociety
Conference_Location :
Las Vegas, NV
Print_ISBN :
1-56347-375-5
DOI :
10.1109/IECEC.2000.870931
