A 4/spl times/64 pixel CMOS image sensor for 3D measurement applications

Author

Schrey, O.M. ; Elkhalili, O. ; Mengel, P. ; Petermann, M. ; Brockherde, W. ; Hosticka, B.J.

Author_Institution

Fraunhofer Inst. of Microelectron. Circuits & Syst., Duisburg, Germany

fYear

2003

fDate

16-18 Sept. 2003

Firstpage

333

Lastpage

336

Abstract

A 4/spl times/64 pixel CMOS image sensor which can capture three-dimensional images has been integrated in a 0.5/spl mu/m n-well standard CMOS processes. It is based on time-of-flight method and employs an active laser pulse illumination at 900nm optical wavelength. System bandwidth is limited by the refreshing time of the active laser source. The sensor employs the so-called "multiple double short time integration" (MDSI) method which enables compensation of background irradiance and correction of reflectivity variations in the object scene. The chip operates at 3.3V power supply voltage and a clock frequency of 5MHz, which yields a frame rate of 19.5 kHz. It has a fast synchronous shutter operating down to 30nsec. The pixel pitch is 130/spl mu/m /spl times/ 300 /spl mu/m and the total chip area is 58.3mm/sup 2/.

Keywords

CMOS image sensors; distance measurement; image processing; reflectivity; semiconductor lasers; time of flight spectra; 0.5 microns; 19.5 KHz; 256 pixels; 3.3 V; 3D measurement applications; 4 pixels; 5 MHz; 64 pixels; 900 nm; CMOS image sensor; MDSI; active laser pulse illumination; active laser source; background irradiance compensation; fast synchronous shutter; multiple double short time integration method; n-well standard CMOS processes; object scene; reflectivity variations correction; refreshing time; system bandwidth; three-dimensional images; time-of-flight method; Bandwidth; CMOS image sensors; CMOS process; Layout; Lighting; Optical pulses; Optical sensors; Pixel; Reflectivity; Wavelength measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Circuits Conference, 2003. ESSCIRC '03. Proceedings of the 29th European

Conference_Location

Estoril, Portugal

Print_ISBN

0-7803-7995-0

Type

conf

DOI

10.1109/ESSCIRC.2003.1257140

Filename

1257140