Title :
Experimental Observation of Charge Transfer by Surface Acoustic Wave in a Monolithic Metal/ZnO/Si (MZOS) Device
Author :
Augustine, F.L. ; Schwartz, R.J. ; Gunshor, R.L.
Keywords :
Acoustic waves; Charge transfer; Fabrication; Optical surface waves; Silicon; Sputtering; Surface acoustic wave devices; Surface acoustic waves; Thickness control; Zinc oxide;
Conference_Titel :
1981 Ultrasonics Symposium
Conference_Location :
Chicago, IL, USA
DOI :
10.1109/ULTSYM.1981.197726