DocumentCode :
2448209
Title :
Long Wavelength Measurement of Surface Cracks in Silicon Nitride
Author :
Tien, J.J. ; Liang, K. ; Khuri-Yakub, B.T. ; Kino, G.S. ; Marshall, D. ; Evans, A.
fYear :
1981
fDate :
14-16 Oct. 1981
Firstpage :
844
Lastpage :
848
Keywords :
Acoustic measurements; Acoustic reflection; Shape measurement; Silicon; Size measurement; Stress measurement; Surface acoustic waves; Surface cracks; Surface waves; Wavelength measurement;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
1981 Ultrasonics Symposium
Conference_Location :
Chicago, IL, USA
Type :
conf
DOI :
10.1109/ULTSYM.1981.197743
Filename :
1534683
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2448209
