Title :
Cantilever-Beamed SAW Accelerometers
Author :
Meunier, P.-L. ; Hartemann, P.
Keywords :
Accelerometers; Acoustic beams; Delay lines; Frequency; Oscillators; Stability; Stress; Structural beams; Surface acoustic waves; Temperature sensors;
Conference_Titel :
1982 Ultrasonics Symposium
Conference_Location :
San Diego, CA, USA
DOI :
10.1109/ULTSYM.1982.197833
