DocumentCode :
2449837
Title :
Accelerometer Sensor Using Piezoelectric ZnO Thin Films
Author :
Motamedi, M.E. ; Andrews, A.P. ; Brower, E.
fYear :
1982
fDate :
27-29 Oct. 1982
Firstpage :
303
Lastpage :
307
Keywords :
Acceleration; Accelerometers; Capacitive sensors; Capacitors; Particle beams; Piezoelectric films; Structural beams; Thin film sensors; Voltage; Zinc oxide;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
1982 Ultrasonics Symposium
Conference_Location :
San Diego, CA, USA
Type :
conf
DOI :
10.1109/ULTSYM.1982.197834
Filename :
1534774
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2449837
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