DocumentCode
2449837
Title
Accelerometer Sensor Using Piezoelectric ZnO Thin Films
Author
Motamedi, M.E. ; Andrews, A.P. ; Brower, E.
fYear
1982
fDate
27-29 Oct. 1982
Firstpage
303
Lastpage
307
Keywords
Acceleration; Accelerometers; Capacitive sensors; Capacitors; Particle beams; Piezoelectric films; Structural beams; Thin film sensors; Voltage; Zinc oxide;
fLanguage
English
Publisher
ieee
Conference_Titel
1982 Ultrasonics Symposium
Conference_Location
San Diego, CA, USA
Type
conf
DOI
10.1109/ULTSYM.1982.197834
Filename
1534774
Link To Document