DocumentCode
2449974
Title
Comparative Evaluation of RF Diode and Magnetron Sputtered ZnO-SiO2 -Si Structures
Author
Cherne, R.D. ; Pierret, R.F. ; Gunshor, R.L. ; Tanielian, M.H. ; Wu, O.K.
fYear
1982
fDate
27-29 Oct. 1982
Firstpage
334
Lastpage
339
Keywords
Annealing; Conductive films; Diodes; Laboratories; Magnetic confinement; Magnetic devices; Radio frequency; Sputtering; Substrates; Zinc oxide;
fLanguage
English
Publisher
ieee
Conference_Titel
1982 Ultrasonics Symposium
Conference_Location
San Diego, CA, USA
Type
conf
DOI
10.1109/ULTSYM.1982.197841
Filename
1534781
Link To Document